SV NEO D16-65
16--65m3/h
8*10—3
DIVAC L
0.6 m3/h
≤ 8 mbar
TRIVAC4-65B
4.2 -65m3/h
< 2 x 10-3 mbar
TRIVAC C8-60
8m3/h～60m3/h
10-4mbar c/s
SV16D,SV25D,SV200 ,SV300,SV630
14,5 m3/h
≤ 0,5 mbar
SV16B,25B,40B,65B,100B
9,5 m3/h
≤ 1,5 mbar
SV28BI、SV40BI
23 m3/h
≤ 5 x 10-2 mbar
SV40-ATEX
26 m3/h
0,8 mbar
